Damage and lattice strain in ion-irradiated AlAs

Abstract
Radiation‐induced damage and strain in AlAs were investigated by measurements of the lattice parameter using x‐ray diffraction. Irradiations employed MeV C, Ar, and Auion beams at 25 or 80 K. The out‐of‐plane lattice parameter increased with fluence at low doses, saturated, and then decreased to nearly its original value. The in‐plane lattice parameter did not change, throughout. These results were independent of the irradiation particle when scaled by damage energy. Selected samples were examined by high‐resolution and conventional transmission electron microscopy. Recovery of the lattice parameter during subsequent thermal annealing was also investigated.