Formation of negative ions in Cs sputter sources

1 May 1986

journal article
Published by AIP Publishing in Review of Scientific Instruments

Vol. 57 (5) , 748-750
https://doi.org/10.1063/1.1138852

Abstract

A surface ionization model with three-body interaction is used to explain the mass spectra of negative ions from Cs sputter sources as well as their time dependence. The importance of the high diffusion rate from radiation-damaged volumes is illustrated and the difficulties these may cause in quantitative mass spectroscopy with Cs sputter sources are discussed. The anomalously large emittance of single negative ions compared to clusters is ascribed to the surface formation and breakup of negative dimers. An example of negative molecule formation which does not proceed by a surface reaction is given.

Keywords

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