SIMS–RBS depth profiling of silver‐diffused glass systems

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Abstract
Both SIMS and RBS techniques are used to obtain smooth accurate concentration profiles of silver diffused into soda‐lime glass systems. By a computer simulation, a combination of the two techniques enables more detailed information to be obtained on the silver distribution at a depth of up to several micrometres, and the concentration profiles can be used effectively for testing the reliability of some optical behaviour characterizations of glass waveguiding structures.