Deposition of SiO2 by reactive excimer laser ablation from a SiO target
- 1 December 1990
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 46 (1-4) , 195-199
- https://doi.org/10.1016/0169-4332(90)90141-l
Abstract
No abstract availableKeywords
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