Observation of two distinct components during pulsed laser deposition of high T c superconducting films
- 4 April 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (14) , 1193-1195
- https://doi.org/10.1063/1.99673
Abstract
Using Rutherford backscattering technique, we have measured the angular distribution of the composition and thickness of the Y‐Ba‐Cu oxide film deposited by firing excimer laser (30 ns, 248 nm) pulses at a stoichiometric Y1Ba2Cu3O7−x pellet. The angular distribution consisted of two distinct components: one a cos θ component, a result of evaporation, and the other a highly forward directed component, a result of a secondary ejection process. The evaporated component is nonstoichiometric, as one would expect, whereas the forward‐directed component has a composition close to that of the pellet. Further, the forward‐directed stoichiometric component increases with the laser energy density in comparison with the evaporated component. These observations are discussed in the context of current models of laser‐induced material ejection at surfaces.The laser energy dependence of the deposition is of critical importance in controlling the film stoichiometry.Keywords
This publication has 19 references indexed in Scilit:
- Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codepositionJournal of Materials Research, 1987
- Preparation of superconducting thin films of Ba2YCu3O7 by a novel spin-on pyrolysis techniqueApplied Physics Letters, 1987
- Reproducible technique for fabrication of thin films of high transition temperature superconductorsApplied Physics Letters, 1987
- Production of YBa2Cu3O7−y superconducting thin films i n s i t u by high-pressure reactive evaporation and rapid thermal annealingApplied Physics Letters, 1987
- Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−xApplied Physics Letters, 1987
- Growth of high T c superconducting thin films using molecular beam epitaxy techniquesApplied Physics Letters, 1987
- Interference between direct and rearrangement mechanisms for double ionizationPhysical Review A, 1987
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987
- Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba2YCu3O7-y Thin FilmJapanese Journal of Applied Physics, 1987
- Thin superconducting oxide filmsPhysical Review B, 1987