Anomalous Dielectric Behavior in Nanometer-Sized Amorphous Silicon Nitride
- 1 November 1993
- journal article
- Published by IOP Publishing in Chinese Physics Letters
- Vol. 10 (11) , 676-679
- https://doi.org/10.1088/0256-307x/10/11/011
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Structure and Bond Properties of Compacted and Heat-Treated Silicon Nitride ParticlesPhysica Status Solidi (a), 1993
- Dielectric properties of chemically vapour-deposited Si3N4Journal of Materials Science, 1989
- Nanocrystalline materialsProgress in Materials Science, 1989