p-type doping with N and Li acceptors of ZnS grown by metalorganic vapor phase epitaxy
- 27 March 2000
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (13) , 1695-1697
- https://doi.org/10.1063/1.126139
Abstract
ZnS layers were grown by metalorganic vapor phase epitaxy on GaAs substrates using diethylzinc, ditertiarybutyl sulphide, and triallylamine as organometallic sources. After postgrowth rapid thermal annealing, the ZnS layers showed p-type conductivity with hole concentrations up to Photoluminescence measurements gave additional indications of the presence of electrically active nitrogen acceptors. In separate experiments, lithium was diffused from a LiH solid source into ZnS layers grown without the nitrogen precursor. High-conductivity p-type material was directly obtained with no need of thermal anneal.
Keywords
This publication has 15 references indexed in Scilit:
- Predictor ofp-type doping in II-VI semiconductorsPhysical Review B, 1999
- MOVPE growth of ZnS on (100)GaAs using dimethylzinc and ditertiarybutyl sulphide precursorsJournal of Crystal Growth, 1999
- Palladium thin film contacts on p-type ZnSe: Adjustment of electrical properties by reaction diffusionJournal of Crystal Growth, 1998
- Effects of annealing atmosphere and temperature on acceptor activation in ZnSe:N grown by photoassisted MOVPEJournal of Crystal Growth, 1996
- Low-resistivity p-type ZnSe, ZnSSe and MgZnSSe grown by gas-source molecular beam epitaxyJournal of Crystal Growth, 1996
- Low-pressure metalorganic vapor phase epitaxy of ZnSe-based light emitting diodesJournal of Crystal Growth, 1994
- Heavy p-doping of ZnTe by molecular beam epitaxy using a nitrogen plasma sourceApplied Physics Letters, 1993
- Characteristics of p-type ZnSe Layers Grown by Molecular Beam Epitaxy with Radical DopingJapanese Journal of Applied Physics, 1991
- P-Type Conduction in ZnS Grown by Vapor Phase EpitaxyJapanese Journal of Applied Physics, 1989
- Hydrogen in Crystalline SemiconductorsAnnual Review of Materials Science, 1988