Vibrating membrane elastometer for reliable measurement of mechanical properties of metallic films
- 1 February 1991
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 62 (2) , 494-501
- https://doi.org/10.1063/1.1142093
Abstract
We describe an apparatus for measuring the biaxial mechanical properties of metallic films. A circular knife‐edge support forms a drum‐head geometry over which the film to be studied is stretched. The film’s tension is obtained from the frequency of its membrane modes, and its strain by using an optical technique. The biaxial modulus is obtained from the ratio of tension and strain. An electronic detection system is developed that regeneratively locks to the film’s resonant frequency. The system is also capable of measuring the film’s damping when the lock is switched off.Keywords
This publication has 12 references indexed in Scilit:
- Elastic Anomalies in SuperlatticesMRS Bulletin, 1990
- Biaxial elastic modulus of metallic films determined from vibrating circular membranesApplied Physics Letters, 1989
- Origin of the supermodulus effect in metallic superlatticesJournal of Applied Physics, 1989
- Elastic Properties of Artificially Layered Thin FilmsMRS Proceedings, 1987
- Hardness measurement at penetration depths as small as 20 nmPhilosophical Magazine A, 1983
- Enhanced elastic moduli in Cu-Ni films with compositional modulationJournal of Applied Physics, 1981
- Enhanced elastic modulus in composition-modulated gold-nickel and copper-palladium foilsJournal of Applied Physics, 1977
- Vibrating Reed Internal Friction Apparatus for Films and FoilsIBM Journal of Research and Development, 1975
- Apparatus for measuring internal friction and elastic constant of samplesJournal of Physics E: Scientific Instruments, 1970
- An electronic instrument for the measurement of the damping capacity of materialsJournal of Scientific Instruments, 1951