The annealing of helium-induced cavities in silicon and the inhibiting role of oxygen
- 1 October 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 28 (3) , 360-363
- https://doi.org/10.1016/0168-583x(87)90176-5
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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