Self-organized InAs quantum dots formation by As/P exchange reaction on (001) InP substrate

Abstract
In this letter, we present the results of InAsquantum dots(QDs) prepared on a (001) InP substrate. As/P exchange reaction at the surface of InP buffer was used to form the InAs islands in the reactor of low pressuremetalorganic chemical vapor deposition at 600 °C. Preliminary characterizations of the InAsQDs have been investigated by using atomic force microscopy and photoluminescence (PL). Room temperature PL emission from the 0-dimensional system centers at 1520 nm and the full width at half maximum of the PL is 92 meV.