Deposition of hard carbon films by the r.f. glow discharge method
- 1 April 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 158 (2) , 233-238
- https://doi.org/10.1016/0040-6090(88)90025-9
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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