SAW resonators using rf-sputtered ZnO films on glass substrates
- 1 August 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 33 (3) , 217-218
- https://doi.org/10.1063/1.90320
Abstract
SAW resonators have been fabricated from reflection strip arrays of ZnO films on borosilicate glass substrates by rf sputtering and standard photolithographic processing. Unloaded Q values were nearly 1000 and a linear temperature coefficient of about −10 ppm/°C was obtained when operated at a frequency of 100 MHz. Achievable Q values for ZnO/glass SAW resonators at this frequency are discussed.Keywords
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