Ellipsometric measurements on tantalum and tantalum oxide films and variation of the optical constants with structure
- 1 April 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 42 (1) , 91-96
- https://doi.org/10.1016/0040-6090(77)90081-5
Abstract
No abstract availableKeywords
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