Phase composition and conductivity of sputtered tantalum
- 1 May 1970
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 5 (5-6) , 407-420
- https://doi.org/10.1016/0040-6090(70)90112-4
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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