Suppression of leakage current in Schottky barrier metal–oxide–semiconductor field-effect transistors
- 15 January 2002
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 91 (2) , 757-759
- https://doi.org/10.1063/1.1425074
Abstract
In this article we investigate the subthreshold behavior of PtSi source/drain Schottky barrier metal–oxide–semiconductor field-effect transistors. We demonstrate very large on/off ratios on bulk silicon devices and show that slight process variations can result in anomalous leakage paths that degrade the subthreshold swing and complicate investigations of device scaling.This publication has 12 references indexed in Scilit:
- 35 nm Metal Gate p-type Metal Oxide Semiconductor Field-Effect Transistor with PtSi Schottky Source/Drain on Separation by Implanted Oxygen SubstrateJapanese Journal of Applied Physics, 1999
- Analysis of the potential distribution in the channel region of a platinum silicided source/drain metal oxide semiconductor field effect transistorApplied Physics Letters, 1999
- Sub-40 nm PtSi Schottky source/drain metal–oxide–semiconductor field-effect transistorsApplied Physics Letters, 1999
- Nanometer patterning of epitaxial CoSi2/Si(100) for ultrashort channel Schottky barrier metal–oxide–semiconductor field effect transistorsApplied Physics Letters, 1999
- Two-dimensional numerical simulation of Schottky barrier MOSFET with channel length to 10 nmIEEE Transactions on Electron Devices, 1998
- An MOS transistor with Schottky source/drain contacts and a self-aligned low-resistance T-gateMicroelectronic Engineering, 1997
- Experimental investigation of a PtSi source and drain field emission transistorApplied Physics Letters, 1995
- Silicon field-effect transistor based on quantum tunnelingApplied Physics Letters, 1994
- New structural approach for reducing punchthrough current in deep submicrometre MOSFETs and extending MOSFET scalingElectronics Letters, 1993
- Silicon Schottky Barrier Diode with Near-Ideal I-V CharacteristicsBell System Technical Journal, 1968