Dry cleaning process of crystalline silicon surface in aSi:H/cSi heterojunction for photovoltaic applications
- 1 February 2002
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 403-404, 307-311
- https://doi.org/10.1016/s0040-6090(01)01645-5
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- CF4/O2 dry etching of textured crystalline silicon surface in a-Si:H/c-Si heterojunction for photovoltaic applicationsSolar Energy Materials and Solar Cells, 2001
- Optimization of n-doping in n-type a-SI:H/p-type textured c-Si heterojunction for photovoltaic applicationsSolar Energy Materials and Solar Cells, 1999
- Development of a new heterojunction structure (ACJ ‐HIT) and its application to polycrystalline silicon solar cellsProgress In Photovoltaics, 1993