Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability
- 14 October 2003
- journal article
- Published by Elsevier in Acta Materialia
- Vol. 51 (19) , 5837-5866
- https://doi.org/10.1016/s1359-6454(03)00440-3
Abstract
No abstract availableKeywords
This publication has 54 references indexed in Scilit:
- IC-Compatible Polysilicon Surface MicromachiningAnnual Review of Materials Science, 2000
- Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structuresPublished by SPIE-Intl Soc Optical Eng ,1996
- Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanismsSensors and Actuators A: Physical, 1994
- Micromotor fabricationIEEE Transactions on Electron Devices, 1992
- Chemical processes in glass polishingJournal of Non-Crystalline Solids, 1990
- Fabrication of micromechanical devices from polysilicon films with smooth surfacesSensors and Actuators, 1989
- IC-processed electrostatic synchronous micromotorsSensors and Actuators, 1989
- IC-processed electrostatic micromotorsSensors and Actuators, 1989
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988