Characteristics of an electrostatically-driven gas valve under high-pressure conditions
- 17 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Micromachined silicon microvalvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Electrostatic film actuator with a large vertical displacementPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- The design and fabrication of a magnetically actuated micromachined flow valveSensors and Actuators A: Physical, 1990
- Integrated micro flow control systemsSensors and Actuators A: Physical, 1990
- Electrically-activated, micromachined diaphragm valvesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990