The sputtering of field electron emitters by self-generated positive ions

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Abstract
The trajectories of positive ions formed in the interelectrode region of a field emitter are calculated. This calculation is used to determine the proportion of ions formed in the interelectrode region which strike the emitting area of the cathode and also to determine their energy distribution. Only ions formed near to the axis of the emitter (with zero initial energy) strike the emitting part of the tip and these have modal energy of the order of 10% of the interelectrode potential, which means that they originate close to the emitter. Experimental results based on depth of damage measurements confirm this energy computation. Ions formed when the electron beam strikes the anode can also cause sputtering but this is generally a less important factor.