Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors
- 21 July 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 71 (3) , 306-308
- https://doi.org/10.1063/1.120440
Abstract
Deflections of bimaterial microcantilever beams were optically detected with 400 fm resolution at room temperature. This enabled photothermal radiation detection with resolutions of 40 pW for power and 10 fJ for energy. The resolution was improved by an order of magnitude by optimizing the thickness ratio of the two beam materials, as well as by modulating the incident radiation at sufficiently high frequency to be in the range of the thermal white noise limit of the cantilever vibrations. Radiative power was detected with a noise spectral density of and 250 pW/Hz and detectivity, D*, of 4.6×107 cm Hz/W.Keywords
This publication has 10 references indexed in Scilit:
- Uncooled thermal imaging using a piezoresistive microcantileverApplied Physics Letters, 1996
- Remote infrared radiation detection using piezoresistive microcantileversApplied Physics Letters, 1996
- Low-temperature magnetic resonance force detectionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Micromechanical sensors for chemical and physical measurementsReview of Scientific Instruments, 1995
- Micromechanical radiation dosimeterApplied Physics Letters, 1995
- Scanning thermal imaging microscopy using composite cantilever probesApplied Physics Letters, 1995
- A femtojoule calorimeter using micromechanical sensorsReview of Scientific Instruments, 1994
- Photothermal spectroscopy with femtojoule sensitivity using a micromechanical deviceNature, 1994
- Observation of a chemical reaction using a micromechanical sensorChemical Physics Letters, 1994
- Mechanical detection of magnetic resonanceNature, 1992