Evanescent‐field scanning microscope with fourier‐transform infrared spectrometer
- 1 January 1994
- Vol. 16 (3) , 368-371
- https://doi.org/10.1002/sca.4950160314
Abstract
An evanescent‐field scanning microscope for infrared microanalysis has been developed. This microscope uses an evanescent field produced by total internal reflection with a high refractive index prism to attain a high spatial resolution, better than the wavelength. This microscope was combined with a Fourier‐transform spectrometer. The principle of the method and experimental results for edge detection at different absorption wavelengths are described.Keywords
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