Atomic Structure and Bonding of Boron-Induced Reconstructions on Si(001)
- 16 January 1995
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 74 (3) , 403-406
- https://doi.org/10.1103/physrevlett.74.403
Abstract
Scanning tunneling microscopy (STM) and tunneling spectroscopy have been used to investigate the local structural and electronic properties of boron-induced reconstructions on Si(001). Thermal decomposition of diborane produces three ordered reconstructions, which arise from ordered arrangements of three structural subunits, with a local boron coverage of ½ monolayer. A structural model is proposed which accounts for the observed STM features. The principal structural subunit is shown to be an ordered arrangement of four boron atoms at substitutional sites in the first bulklike silicon layer, which is then capped with ordered arrangements of silicon dimers and dimer vacancies.Keywords
This publication has 13 references indexed in Scilit:
- Growth of Si on Si(100) via H/Cl exchange and the effect of interfacial boronJournal of Applied Physics, 1992
- Elemental marking of Si on Si(100) interfacesApplied Physics Letters, 1992
- Low-temperature homoepitaxy on Si(111)Applied Physics Letters, 1991
- Ordered monolayer structures of boron in Si(111) and Si(100)Journal of Vacuum Science & Technology A, 1991
- Buried, ordered structures: Boron in Si(111) and Si(100)Journal of Crystal Growth, 1991
- Si(100)-(2×1)boron reconstruction: Self-limiting monolayer dopingApplied Physics Letters, 1990
- Electronic states due to surface doping: Si(111)√3×√3BPhysical Review B, 1990
- Structure determination of the Si(111):B(√3×√3)R30° surface: Subsurface substitutional dopingPhysical Review Letters, 1989
- Nonequilibrium boron doping effects in low-temperature epitaxial silicon filmsApplied Physics Letters, 1987
- Doping reaction of PH3 and B2H6 with Si(100)Journal of Applied Physics, 1986