Abstract
In situ channeling analysis showed that the temperature-dependent lattice occupancy for highly nonsoluble systems with rather high positive heat of solution (produced by ion implantation) is governed by the formation of impurity-vacancy complexes. The trapping probability of vacancies as well as the stability of the clusters against annihilation with mobile self-interstitial atoms are correlated with the calculated heat of solution indicating that these processes are governed by thermodynamic driving forces in the dynamic collision cascade. It is concluded that impurity-vacancy recombination and multivacancy trapping processes are the most important mechanisms which determine the lattice-site occupation of implanted ions in metals.

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