On the energy and angular distribution of sputtered polyatomic molecules
- 1 September 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 28 (2) , 205-213
- https://doi.org/10.1016/0168-583x(87)90106-6
Abstract
No abstract availableKeywords
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