Compensation for Substrate Permittivity in Probe-Tip Calibration

1 December 1994

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

Vol. 26, 20-30
https://doi.org/10.1109/arftg.1994.327077

Abstract

We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.

Keywords

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