On-wafer impedance measurement on lossy substrates
Open Access
- 1 June 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Microwave and Guided Wave Letters
- Vol. 4 (6) , 175-176
- https://doi.org/10.1109/75.294283
Abstract
This paper introduces a new method for measuring impedance parameters in transmission lines fabricated on lossy or dispersive dielectrics. The method, which uses an independent calibration to provide an impedance reference, compares well with conventional techniques when applied to lossless substrates. The effectiveness of the technique is illustrated for resistors fabricated on lossy silicon substrates.Keywords
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