Mems: What Lies Ahead?
- 24 August 2005
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 894-897
- https://doi.org/10.1109/sensor.1995.717377
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Integrated uncooled infrared detector imaging arraysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- An integrated CMOS potentiostat for miniaturized electroanalytical instrumentationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A micromachined low-power temperature-regulated bandgap voltage referencePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Digital micromirror device and its application to projection displaysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Silicon-substrate microelectrode arrays for parallel recording of neural activity in peripheral and cranial nervesIEEE Transactions on Biomedical Engineering, 1994
- A gas chromatographic air analyzer fabricated on a silicon waferIEEE Transactions on Electron Devices, 1979