A sub-micron particle filter in silicon
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 904-907
- https://doi.org/10.1016/0924-4247(90)87056-o
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- New fluid filter structure in silicon fabricated using a self-aligning techniqueApplied Physics Letters, 1988
- Wafer bonding for silicon-on-insulator technologiesApplied Physics Letters, 1986
- (100) Silicon Etch‐Rate Dependence on Boron Concentration in Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1984
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979
- Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped SiliconJournal of the Electrochemical Society, 1971
- A Water-Amine-Complexing Agent System for Etching SiliconJournal of the Electrochemical Society, 1967