Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
- 1 September 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (5) , 2841-2849
- https://doi.org/10.1116/1.582022
Abstract
No abstract availableThis publication has 37 references indexed in Scilit:
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