The intertool profile interchange format: a technology CAD environment approach (semiconductor technology)
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 10 (9) , 1157-1162
- https://doi.org/10.1109/43.85762
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The intertool profile interchange format: an object-oriented approach (semiconductor technology CAD/CAM)IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1991
- An interchange format for process and device simulationIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1988
- Data structuring for process and device simulationsIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1988
- SIMPL-2: (SIMulated Profiles from the Layout-Version 2)IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1988
- A general simulator for VLSI lithography and etching processes: Part II—Application to deposition and etchingIEEE Transactions on Electron Devices, 1980