Environmental sensors based on micromachined cantilevers with integrated read-out
Top Cited Papers
- 1 February 2000
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 82 (1-4) , 11-16
- https://doi.org/10.1016/s0304-3991(99)00148-5
Abstract
No abstract availableKeywords
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