One-step formation of aligned carbon nanotube field emitters at 400 °C
- 7 April 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (15) , 2485-2487
- https://doi.org/10.1063/1.1566803
Abstract
Fabrication of field emitters by the radio-frequency plasma-enhanced chemical vapor deposition of vertically aligned carbon nanotubes (CNT) on soda-lime glass is reported. CNT was produced at 400 °C by the control of the collision energy of carbonic cations to a substrate through a dc bias voltage. The CNTs produced in this work were of a cup-stacked type and had catalyst particles on the top. The CNT emitters formed by our method were integrated into triode-type microcathodes and showed field-emission properties suitable for display applications.Keywords
This publication has 13 references indexed in Scilit:
- Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrodeNanotechnology, 2001
- Raman spectroscopy and field-emission properties of CVD-grown carbon-nanotube filmsApplied Physics A, 2001
- Graphitic cones in palladium catalysed carbon nanofibresChemical Physics Letters, 2001
- Synthesis of aligned carbon nanotubes using thermal chemical vapor depositionChemical Physics Letters, 1999
- Cathode Ray Tube Lighting Elements with Carbon Nanotube Field EmittersJapanese Journal of Applied Physics, 1998
- A Carbon Nanotube Field-Emission Electron SourceScience, 1995
- Unraveling Nanotubes: Field Emission from an Atomic WireScience, 1995
- Quadrupole mass spectrometric study of positive ions from RF plasmas of pure CH4, CH4/H2, and CH4/Ar systemsPlasma Chemistry and Plasma Processing, 1991
- Helical microtubules of graphitic carbonNature, 1991
- Plasma sheath thickness in radio-frequency dischargesJournal of Applied Physics, 1990