Method for the simultaneous measurement of surface and bulk conductance in semiconductors

15 January 1984

journal article
conference paper
Published by AIP Publishing in Applied Physics Letters

Vol. 44 (2) , 225-227
https://doi.org/10.1063/1.94679

Abstract

A new method is proposed for the simultaneous measurement of bulk and surface conductances in semiconductors, based on the use of three surface contacts. Detailed numerical calculations of the electric field distribution in the sample are presented and the role of geometrical parameters (contact spacing, width, and sample thickness) is discussed. The method can find direct application in the assessment of processing-induced modifications in the surface and bulk of semiconductor materials.

Keywords

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