Influence of nitrogen incorporation in ultrathin SiO2 on the structure and electronic states of the SiO2/Si(100) interface
- 1 June 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 159-160, 75-82
- https://doi.org/10.1016/s0169-4332(00)00078-7
Abstract
No abstract availableKeywords
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