Progress report on the 400 keV research implanter at the University of Surrey
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 100-105
- https://doi.org/10.1016/0168-583x(85)90616-0
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Improved uniformity of implanted dose by a compensated scan pattern generatorNuclear Instruments and Methods in Physics Research, 1981