Secondary ion imaging in the scanning ion microscope
- 15 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3) , 368-374
- https://doi.org/10.1016/0167-5087(83)91008-6
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961