Ion Implanted Buried Si3N4 Layers below Epitaxial NSi2 Layers

This publication has 4 references indexed in Scilit:

• Fabrication of buried layers of SiO2 and Si3N4 a using ion beam synthesis
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
• Silicon on Insulator Formed By O⁺ OR N⁺ Ion Implantation
  MRS Proceedings, 1985
• The formation of buried Si3N4 layers in silicon by high dose nitrogen ion implantation
  Thin Solid Films, 1983
• A Review of Silicon-On-Insulator Formation by Oxygen Ion Implantation
  MRS Proceedings, 1983