The different roles of charged and neutral atomic and molecular oxidising species in silicon oxidation from ab initio calculations
Open Access
- 31 August 2001
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 45 (8) , 1233-1240
- https://doi.org/10.1016/s0038-1101(00)00263-x
Abstract
No abstract availableKeywords
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