Micromachined valve with hydraulically, actuated membrane, subsequent to a thermoelectrically controlled bimorph cantilever
- 1 November 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 39 (2) , 169-176
- https://doi.org/10.1016/0924-4247(93)80214-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Micromachined thermoelectrically driven cantilever structures for fluid jet deflectionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- A pressure-balanced electrostatically-actuated microvalvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Electrically-activated, micromachined diaphragm valvesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988