Fabrication of vapor-deposited micro heat pipe arrays as an integral part of semiconductor devices
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (3) , 119-131
- https://doi.org/10.1109/84.465123
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Experimental Investigation of Micro Heat Pipes Fabricated in Silicon WafersJournal of Heat Transfer, 1993
- On the Use of Micro Heat Pipes as an Integral Part of Semiconductor DevicesJournal of Electronic Packaging, 1992
- Ion-Beam Deposition of Thin Films:Influence on Surface and Volume MicrostructureMRS Proceedings, 1985
- Vertical Etching of Silicon at very High Aspect RatiosAnnual Review of Materials Science, 1979
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978