D.c. magnetron sputtering of oxidation-resistant chromium and CrN films monitored by optical emission spectrometry
- 1 July 1991
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 139, 126-131
- https://doi.org/10.1016/0921-5093(91)90606-n
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Properties of Crn and (Ti, Al)N Coatings Produced by High Rate Sputter DepositionSurface Engineering, 1987