Scheduling semiconductor wafer fabrication
- 1 January 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 1 (3) , 115-130
- https://doi.org/10.1109/66.4384
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Capacity planning of a photolithography work cell in a wafer manufacturing linePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Brownian Models of Queueing Networks with Heterogeneous Customer PopulationsPublished by Springer Nature ,1988
- Performance Analysis Techniques for IC Manufacturing LinesAT&T Technical Journal, 1986
- Optimal control of admission to a quenching systemIEEE Transactions on Automatic Control, 1985
- Performance models for unreliable flexible manufacturing systemsOmega, 1984
- Open and Closed Models for Networks of QueuesAT&T Bell Laboratories Technical Journal, 1984
- Performance of the Queueing Network AnalyzerBell System Technical Journal, 1983
- The Queueing Network AnalyzerBell System Technical Journal, 1983
- Time-Sharing Service Systems. ITheory of Probability and Its Applications, 1975
- A Proof for the Queuing Formula: L = λWOperations Research, 1961