Oxidation of the surface ofGe
- 1 January 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 27 (1) , 551-553
- https://doi.org/10.1103/physrevb.27.551
Abstract
An oxide layer grown on the Ge surface after exposure to pure oxygen is found to be mainly from the in situ observation of x-ray photoelectron spectroscopy. The thickness of the layer varies with the oxidation time by following the logarithmic-growth law. The oxide layer serves as a protective stable film with a thickness of around 1.5 nm. Beneath the oxide layer an Nb-deficient layer occurs in a thickness of 2 nm due to the preferential diffusion of Nb atoms. This is caused by the contact potential difference between the Ge and adsorbed oxygen layers and the ionization potential difference between Nb and Ge atoms.
Keywords
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