Observation of Hydrogen-Terminated Silicon (111) Surface by Ultrahigh-Vacuum Atomic Force Microscopy
- 1 September 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (9B) , L1321-1323
- https://doi.org/10.1143/jjap.32.l1321
Abstract
Si(111) surface terminated with hydrogen by NH4F treatment was observed with an ultrahigh-vacuum atomic force microscope (UHV-AFM). Monoatomic steps, triangular etch pits and contamination islands were imaged. Atomically resolved images were also obtained and the periodicity in these images is in good agreement with the Si(111):H-1×1 (monohydride) structure. The corrugation amplitude is 0.10-0.12 nm, which is much larger than any STM result. This value is in fairly good agreement with the value expected in the contact hard sphere model.Keywords
This publication has 19 references indexed in Scilit:
- Atomic resolution images of H-terminated Si(111) surfaces in aqueous solutionsApplied Physics Letters, 1992
- Scanning Tunneling Microscopy of HF-Controlled Si(111) SurfacesMRS Proceedings, 1992
- Atomic Structure of Hydrogen-Terminated Si(111) Surfaces by Hydrofluoric Acid TreatmentsJapanese Journal of Applied Physics, 1991
- Step-flow mechanism versus pit corrosion: scanning-tunneling microscopy observations on wet etching of Si(111) by HF solutionsChemical Physics Letters, 1991
- Atomic Resolution on the AgBr(001) Surface by Atomic Force MicroscopyEurophysics Letters, 1991
- Comparison of Si(111) surfaces prepared using aqueous solutions of NH4F versus HFApplied Physics Letters, 1991
- Chemically etched silicon surfaces viewed at the atomic level by force microscopyJournal of the American Chemical Society, 1991
- Atomic resolution on the surface of LiF(100) by atomic force microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Atomic-scale conversion of clean Si(111):H-1×1 to Si(111)-2×1 by electron-stimulated desorptionPhysical Review Letters, 1990
- Si(111): Si—A Simple New Surface PhasePhysical Review Letters, 1975