Electro-optic AlGaAs spatial light deflector/modulator based on a grating phased array

Abstract
A novel beam steering device using gratings integrated on rib waveguides as input and output couplers is proposed. Phasing is achieved electro-optically by applying an electric field on an indium-tin-oxide/AlGaAs Schottky junction. A two elements device is first used to characterize the phase modulation characteristics of the structure. A 43 elements device with sawtooth electrodes is then presented, that permits spatial three-point digital beam steering or amplitude modulation. The outcoupled beams have an angular width of 1.8 mrad full width at half maximum. The switched beam angular separation is 9 mrad, the switching voltage is −21 V.

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