A statistical study of the combined effects of substrate temperature, bias, annealing and a Cr3Si2 undercoating on the tribological properties of r.f. sputtered MoS2 coatings
- 1 November 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 154 (1-2) , 323-332
- https://doi.org/10.1016/0040-6090(87)90376-2
Abstract
No abstract availableKeywords
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