19F and 1H NMR and ESR in a-Si:F:H and a-Si:H
- 1 June 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (6) , L399
- https://doi.org/10.1143/jjap.20.l399
Abstract
F NMR signal consists of only a broad line for as-deposited film, while H NMR signals are composed of broad and narrow lines. Most F atoms, therefore, are considered to exist in the closely gathered phase. The total F content does not appreciably change by annealing to 600°C, but a narrow line appears at 450°C, suggesting the change of incorporation scheme of F. Annealing makes the content of H contributing to the broad line decrease faster than that contributing to the narrow line. The change in ESR center density by annealing is discussed in relation to the change of NMR signals.Keywords
This publication has 4 references indexed in Scilit:
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