Fabrication-Tolerant Waveguide Chirped Grating Coupler for Coupling to a Perfectly Vertical Optical Fiber
- 26 August 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 20 (23) , 1914-1916
- https://doi.org/10.1109/lpt.2008.2004715
Abstract
We report the simulation, fabrication, and measurement results of a waveguide grating coupler that could efficiently couple light between submicrometer-sized planar waveguides and vertical optical fibers. The coupler comprises a section of chirped grating which reduces back reflection and enhances coupling efficiency. Coupling efficiency of over 34% was measured and a 3-dB bandwidth of 45 nm was obtained. An experimental study showed that the coupling efficiency was tolerant to fabrication process fluctuations which may lead to random variations in slot width and the duty cycle of the grating periods.Keywords
This publication has 11 references indexed in Scilit:
- Compact Focusing Grating Couplers for Silicon-on-Insulator Integrated CircuitsIEEE Photonics Technology Letters, 2007
- Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator WaveguidesIEEE Photonics Technology Letters, 2007
- High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibersOptics Letters, 2007
- Grating Couplers for Coupling between Optical Fibers and Nanophotonic WaveguidesJapanese Journal of Applied Physics, 2006
- Monolithically integrated asymmetric graded and step-index couplers for microphotonic waveguidesOptics Express, 2006
- Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguidesIEEE Photonics Technology Letters, 2005
- Compact efficient broadband grating coupler for silicon-on-insulator waveguidesOptics Letters, 2004
- Nanotaper for compact mode conversionOptics Letters, 2003
- Low loss mode size converter from 0.3 µm square Si wire waveguides to singlemode fibresElectronics Letters, 2002
- An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibersIEEE Journal of Quantum Electronics, 2002