Generic scanned-probe microscope sensors by combined micromachining and electron-beam lithography
- 1 January 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (1) , 54-58
- https://doi.org/10.1116/1.589835
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Reliable fabrication of sub-40 nm period gratings using a nanolithography system with interferometric dynamic focus controlJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Scanning Hall probe microscopy of superconductors and magnetic materialsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Nanofabrication of sensors on cantilever probe tips for scanning multiprobe microscopyApplied Physics Letters, 1996
- Micromachined submicrometer photodiode for scanning probe microscopyApplied Physics Letters, 1995
- Thermal imaging using the atomic force microscopeApplied Physics Letters, 1993
- Submicron Si trench profiling with an electron-beam fabricated atomic force microscope tipJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Improved scanning ion-conductance microscope using microfabricated probesReview of Scientific Instruments, 1991
- Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric ScaleScience, 1991
- Scanning thermal profilerApplied Physics Letters, 1986
- Near Field Scanning Optical Microscopy (NSOM)Biophysical Journal, 1986