Influence of Ozone Concentration on the Preparation of Stoichiometric Superconducting Y-Ba-Cu-O Films by a Metalorganic Chemical Vapor Deposition Technique
- 1 August 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (8B) , L1477-1479
- https://doi.org/10.1143/jjap.30.l1477
Abstract
As-grown, nearly stoichiometric YBa2Cu3O7-x superconducting films were prepared by a metalorganic chemical vapor deposition technique on SrTiO3(100) substrates at 650°C. This letter describes how the film characteristics change with the concentration of ozone in O2 gas. It was found that the superconducting characters of nearly stoichiometric films can be improved by optimizing the ozone concentration. At 3% concentration of ozone, a film with the zero-resistive temperature of 85 K was obtained at a composition of Y:Ba:Cu=1.1:2:2.7. It had a smooth surface morphology and a good c-axis orientation.Keywords
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